Precision Cleaning
In an effort to help our customers streamline their supply chains STS offers a full range of precision cleaning services for components and finished assemblies. These include extensive processes for cleaning new and refurbished etch and implant components & multiple substrates and comprehensive post cleaning surface analysis.
Cleaning Facilities and EquipmentDuring the cleaning process STS takes many precautions to ensure that cross contamination is avoided while processing components. All in-process and final cleaning areas are fully segregated for contamination control. The STS cleaning process begins in a class 10,000 clean room where incoming inspection and initial cleaning steps are performed. Surface critical cleaning, baking, final inspection and vacuum seal packaging processes are completed in a Class 100 clean room.
Processing TechniquesSTS uses a Single use bath batch processing that utilizes semiconductor grade chemicals and clean room qualified materials. All process conditions are controlled, monitored and documented using process travelers to ensure optimum surface integrity of cleaned components.
Material Capabilities and ExperienceSTS has extensive experience working with and cleaning:
- New and refurbished Etch and Implant components:
- Etch ESCs, Showerheads, Chamber Liners, Etc.
- Implant Vision, GSDs, Etc.
- Substrates cleaned include both metallics and exotic ceramics
- All process fixtures and baths are 300mm component capable
Post Cleaning Surface Analysis In addition to industry leading process, materials and environmental control on our cleaning processes, STS has the added capabilities for examining the surface of a cleaned part. These include:
- CMM dimensional measurement
- Surface profilometer measurement
- Eddy current meters for coating thickness
- SEM high magnification for grain boundary imaging
- UV black light inspection for non-visual contamination
If you have any questions about the STS Precision Cleaning process please Contact Us.